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Keywords: Flow–batch analyzer Urethane–acrylate photo-resist Microfabrication Deep ultraviolet-lithography UV–vis spectrophotometry Determination of Fe(II) a b s t r a c t This study introduces the first micro-flow–batch analyzer (FBA).

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^ Madou, Mark (2012). Fundamentals of Microfabrication and Nanotechnology volume 2. Boca Raton, Fl: CRC Press. p. 655. ISBN 978-1-4200-5519-1.

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